Process Control System "VA PROCOS 2"
Stable measurement and control even with low light intensity plasma! Constructing PEM with thermally stable photomultiplier tubes.
"VA PROCOS 2" is a modular process control system specially designed to stabilize reactive sputtering processes in sensitive transition modes. It is suitable for process adjustments using combinations of optical emission spectra, cathode voltage, oxygen partial pressure, and/or other PLC signals. Additionally, it can be used to stabilize product characteristics by adjusting the stabilization of plasma discharge and the supply of one or more reactive gases. 【Features】 ■ Improved film deposition rate ■ Special processing for "arc" event detection and response ■ Selection of action points ■ Automatic online balance adjustment ■ Configuration of PEM with thermally stable photomultiplier tubes *For more details, please refer to the PDF materials or feel free to contact us.
- Company：フォンアルデンヌジャパン
- Price：Other
